Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions

Author：edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
Publisher：Noyes Publications
ISBN：0815512201 :
Publication Date：c1990.
其他作者：Rossnagel, Stephen M. ; Cuomo, J. J. ; Westwood, William D.
語言：zh
出版地：Park Ridge, N.J., U.S.A. :
Description

xxiii, 523 p. ::ill. ;:25 cm.

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