Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

Author：edited by G鋎nter Wilkening, Ludger Koenders.
Publisher：Wiley-VCH
ISBN：352740502X : ; 9783527405022
Publication Date：c2005.
其他作者：Wilkening, G鋎nter. ; Koenders, Ludger.
語言：eng
出版地：Weinheim :
Description

xxii, 519 p. ::ill. ;:25 cm.

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