Precursor Chemistry of Advanced Materials : CVD, ALD and Nanoparticles

Author：edited by Roland A. Fischer.
Publisher：Springer-Verlag GmbH.
ISBN：9783540314516 (electronic bk.) ; 9783540016052 (paper)
Publication Date：2005
其他作者：Fischer, Roland A.
語言：zh
出版地：Berlin Heidelberg :
Description

xv, 213 p. ::ill., digital ;:25 cm.

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