Reactive Sputter Deposition

Author：edited by Diederik Depla, Stijn Mahieu.
Publisher：Springer-Verlag Berlin Heidelberg
ISBN：9783540766643 (electronic bk.) ; 9783540766629 (paper)
Publication Date：2008
其他作者：Depla, Diederik. ; Mahieu, Stijn.
語言：zh
出版地：Berlin, Heidelberg :
Description

xviii, 570 p. ::ill. (some col.), digital ;:25 cm.

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