MEMS : introduction and fundamentals

Author：edited by Mohamed Gad-El-Hak.
Publisher：CRC/Taylor & Francis
ISBN：0849391377 : ; 9780849391378 ; 0849321069 (set)
Publication Date：c2006.
其他作者：Gad-el-Hak, Mohamed
版次：2nd ed.
語言：eng
出版地：Boca Raton, FL :
Description

1 v. (various pagings) ::ill. (some col.) ;:27 cm.

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