Design and manufacturing of active microsystems

Author：edited by Stephanus Buttgenbach, Arne Burisch, Jurgen Hesselbach.
Publisher：Springer-Verlag Berlin Heidelberg
ISBN：9783642129032 (electronic bk.) ; 9783642129025 (paper)
Publication Date：2011
其他作者：Buttgenbach, Stephanus. ; Burisch, Arne. ; Hesselbach, Jurgen.
語言：zh
出版地：Berlin, Heidelberg :
Description

xii, 444 p. ::ill., digital ;:24 cm.

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