Handbook of chemical vapor depostion [i.e. deposition] (CVD) : principles, technology, and applications

Author：by Hugh O. Pierson.
Publisher：Noyes Publications/William Andrew Pub.
ISBN：9780815514329 ; 0815514328
Publication Date：c1999.
其他作者：Pierson, Hugh O. ; Pierson, Hugh O.
版次：2nd ed.
語言：zh
出版地：Norwich, N.Y. :
Description

1 online resource (xxiv, 482 p.) ::ill.

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