Handbook of thin film deposition : techniques, processes, and technologies

Author：edited by Krishna Seshan.
Publisher：Elsevier ; William Andrew
ISBN：9781437778731 (electronic bk.) ; 9781437778731
Publication Date：2012
其他作者：Seshan, Krishna.
版次：3rd ed.
語言：eng
出版地：Amsterdam ; Boston : Waltham :
Description

xviii, 392 p. ::ill. ;:24 cm.

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