PVD for microelectronics : sputter deposition applied to semiconductor manufacturing

Author：Ronald A. Powell, Stephen M. Rossnagel.
Publisher：Academic Press
ISBN：9780125330268 (electronic bk.) ; 9780125330268
Publication Date：c1999.
其他作者：Powell, Ronald A. ; Rossnagel, Stephen M.
語言：eng
出版地：San Diego :
Description

xiii, 419 p. ::ill. ;:24 cm.

Search Same Author