Micro mechanical systems : principles and technology

Author：edited by T. Fukuda and W. Menz.
Publisher：Elsevier
ISBN：9780444823632 (electronic bk.) ; 9780444823632
Publication Date：1998
其他作者：Fukuda, T. ; Menz, W.
語言：eng
出版地：Amsterdam ; New York :
Description

viii, 268 p. ::ill. ;:25 cm.

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