Handbook of silicon based MEMS materials and technologies

Author：edited by Markku Tilli ... [et al.]
Publisher：William Andrew
ISBN：9780323312233 (electronic bk.) ; 0323312233 (electronic bk.) ; 9780323299657 (electronic bk.)
Publication Date：2015
其他作者：Tilli, Markku.
版次：2nd ed.
語言：eng
出版地：London, UK :
Description

1 online resource ::ill.

Search Same Author