Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications

Author：edited by Krishna Seshan.
Publisher：Noyes Publications/William Andrew Pub.
ISBN：1591241936 (electronic bk.) ; 9781591241935 (electronic bk.) ; 9780815517788 (electronic bk.) ; 0815517785 (electronic bk.) ; 9780815514428 ; 0815514425 ; 9780815517764 (electronic bk.) ; 0815517769 (electronic bk.)
Publication Date：c2002.
其他作者：Seshan, Krishna.
版次：2nd ed.
語言：zh
出版地：Norwich, N.Y. :
Description

1 online resource (xxviii, 629 p.) ::ill.

Search Same Author