Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications

作者：edited by Krishna Seshan.

出版社：Noyes Publications/William Andrew Pub.

ISBN：1591241936 (electronic bk.) ; 9781591241935 (electronic bk.) ; 9780815517788 (electronic bk.) ; 0815517785 (electronic bk.) ; 9780815514428 ; 0815514425 ; 9780815517764 (electronic bk.) ; 0815517769 (electronic bk.)

出版日期：c2002.

其他作者：Seshan, Krishna.

版次：2nd ed.

語言：zh

出版地：Norwich, N.Y. :

內容簡介

1 online resource (xxviii, 629 p.) ::ill.

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